Section 1 - CHEMICAL PRODUCT AND COMPANY IDENTIFICATION

PRODUCT NAME

JSR KRF M78Y

NFPA

PRODUCT USE

Photoresist for integrated circuit production.

SYNONYMS

"photoresist integrated circuit production", "photosensitiser and polyhydroxystyrene
derivatives solution"

Section 2 - HAZARDS IDENTIFICATION

CANADIAN WHMIS SYMBOLS

EMERGENCY OVERVIEW

RISK

Irritating to respiratory system.
Risk of serious damage to eyes.
May cause harm to the unborn child.
HARMFUL - May cause lung damage if swallowed.
Flammable.

POTENTIAL HEALTH EFFECTS

ACUTE HEALTH EFFECTS

SWALLOWED

  Although ingestion is not thought to produce harmful effects, the material may still be damaging to the health of the individual following ingestion, especially where pre-  existing organ (e.g. liver, kidney) damage is evident. Present definitions of harmful or toxic substances are generally based on doses producing mortality (death) rather than those producing morbidity (disease, ill-health). Gastrointestinal tract discomfort may produce nausea and vomiting. In an occupational setting however, ingestion of insignificant quantities is not thought to be cause for concern.  Accidental ingestion of the material may be damaging to the health of the individual.  Swallowing of the liquid may cause aspiration into the lungs with the risk of chemical pneumonitis; serious consequences may result. (ICSC13733).  

EYE

  If applied to the eyes, this material causes severe eye damage.  The material may produce severe irritation to the eye causing pronounced inflammation. Repeated or prolonged exposure to irritants may produce conjunctivitis.  

SKIN

  The material is not thought to produce adverse health effects or skin irritation following contact (as classified using animal models). Nevertheless, good hygiene practice requires that exposure be kept to a minimum and that suitable gloves be used in an occupational setting.  Entry into the blood-stream, through, for example, cuts, abrasions or lesions, may produce systemic injury with harmful effects. Examine the skin prior to the use of the material and ensure that any external damage is suitably protected.  

INHALED

  Inhalation may produce health damage*.  The material can cause respiratory irritation in some persons. The body's response to such irritation can cause further lung damage.  Inhalation of vapours may cause drowsiness and dizziness. This may be accompanied by narcosis, reduced alertness, loss of reflexes, lack of coordination and vertigo.  The main effects of simple esters are irritation, stupor and insensibility. Headache, drowsiness, dizziness, coma and behavioral changes may occur. Respiratory symptoms may include irritation, shortness of breath, rapid breathing, throat inflammation, bronchitis,  lung inflammation and pulmonary edema, sometimes delayed. Nausea, vomiting, diarrhea and cramps are observed. Liver and kidney damage may result from massive exposures.  If exposure to highly concentrated solvent atmosphere is prolonged this may lead to narcosis, unconsciousness, even coma and possible death.  Acute effects from inhalation of high vapor concentrations may be chest and nasal irritation with coughing, sneezing, headache and even nausea.  

CHRONIC HEALTH EFFECTS

  Ample evidence exists, from results in experimentation, that developmental disorders are directly caused by human exposure to the material.  

  Chronic solvent inhalation exposures may result in nervous system impairment and liver and blood changes. [PATTYS].  Some glycol esters and their ethers cause wasting of the testicles, reproductive changes, infertility and changes to kidney function. Shorter chain compounds are more dangerous. Higher concentrations and prolonged exposure can cause blood in the urine.